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Submit Date Name Organisation Statement of capabilities/facilities
2020-06-26. Didier Théron CNRS We are developing Scanning Microwave Microscopy in a SEM environnement for basic research purposes.
We have also expertise in microwave calibration and measurements at the nanoscale.
2020-06-26. Kamel Haddadi IEMN - University of Lille - Scanning probe microscopy including AFM, C-AFM, SMM (in air and vacuum)
- RF Measurement systems development such as six-port reflectometer from MHz to 110 GHz.
2020-06-26. Pascal Chretien GeePs, CNRS, Centrale-Supelec Our team at the GeePs laboratory has more than 20 years of expertise in local electrical measurements by conductive probe AFM. In particular, we have developed the "Resiscope" module which allows resistance measurements over a very wide range, up to eleven decades. A version of this device has been transferred to the instrumentation company CSI. More recently, we have developed a specific calibration sample for this type of measurements, which has also just been licensed to CSI to allow its diffusion. This sample could be studied during the project and also probably be improved, to serve as a starting point for a metrological approach specific to resistance (or current) measurements by CP-AFM.

2020-06-26. Frédéric Houzé GeePs, CNRS-CentraleSupélec Our team at the GeePs laboratory has more than 20 years of expertise in local electrical measurements by conductive probe AFM. In particular, we have developed the "Resiscope" module which allows resistance measurements over a very wide range, up to eleven decades. A version of this device has been transferred to the instrumentation company CSI. More recently, we have developed a specific calibration sample for this type of measurements, which has also just been licensed to CSI to allow its diffusion. This sample could be studied during the project and also probably be improved, to serve as a starting point for a metrological approach specific to resistance (or current) measurements by CP-AFM.
2020-06-26. Didier Pellerin CSI • CSI is a French manufacturer of Atomic Force Microscope and specific options. The company was founded in 2006 by a team of experts working in AFM field for more than 20 years, starting as pioneer with some historical manufacturers.
CSI is well know for electrical measurements with its HDKFM module and the ResiScope. The ResiScope is a unique solution for collecting current on a scanning AFM tip while maintaining optimum shielding for resistance measurements over 10 decades. It was developped with GeepS laboratory (SUPELEC)
It is from this experience that CSI will ensure shielding and electrical continuity on an AFM tip specifically designed for electrical measurements. CSI also developped a specific tip holder for Scanning Microwave Microscope. CSI wants to find solutions for calibration samples for electrical measurements and already starts to work on that. CSI is also working on new coupling with microwave microscope.
CSI can bring all its experience in Electrical measurements.
2020-06-26. Georg Gramse Johannes Kepler University We have 2 operational Keysight SMMs with additional CS-AFM capabilities that could be part-time devoted to the project. There is a profound knowledge on technical and application aspects of SMM in the group that could be helpful for the project.
2020-06-25. Phil Dobson University of Glasgow Scanning of functionalised AFM probes in a commercial AFM
Scanning of probes using piezostage
Design and construction of supporting electronic instrumentation and mounting
Full range of fabrication technology including e-beam and optical exposure, plasma etch and deposition, supporting metrology including optical microscopy, SEM AFM ellipsometry and optical profilometry
Some access to high frequency on-wafer test
Fabrication of nanostructured test samples on a wafer scale
Fabrication of functionalised AFM probes on a wafer scale
2020-06-25. Aisha Gokce Ozbay TUBITAK UME Quantum Metrology Lab in TUBITAK National Metrology Institute, UME accommodates:
One AFM ( NanoScan ) in vacuum environment with following options:
Contact mode measurements with conducting AFM
Tapping mode measurements along with MFM
Kelvin Probe Microscopy
SThM
Force Modes with modulation on two frequencies, lateral force, electrostatic force
Multi-frequency mode
Phase-amplitude modulation
One AFM (NanoSurf P6) in vacuum environment with low temperature option that also has the above capabilities.
Electrical equipment to enhance the AFM process by means of accessing the tip and sample providing additional bias or monitoring alternatives. Such equipment includes sampling oscilloscopes, spectrum analyzers, source meters and nA-meters, lock-in amplifiers.
One cryogenic AFM available integrated in an Attocube cryo-cooler.
A Sensofar Optical Profiler with ISO and EN standards on surface roughness measurements
One NanoFrazor Thermal Lithography device -contact AFM with heated tip
2020-06-24. toai le quang Federal Institute of Metrology SMM measurements
SMM hardware development
Clean room work
Comsol simulation
2020-06-23. Lukasz BOROWIK CEA-LETI - Kelvin Probe Force Microscopy
- Scanning Spreading Resistance Microscopy
- Scanning Capacitance Microscopy

In total, three microscopes including one under UHV and one in glow box.
AFM under UHV is equipped in sample illumination system.
2020-06-22. Narciso Gambacorti CEA-LETI CEA-LETI is one of the major technological research institute in Europe in the field of micro- and nano-technologies. CEA-LETI is interested in participate with his in-line metrology and off-line characterization platforms.
2020-06-18. Brice GAUTIER Institut des Nanotechnologies de Lyon * Scanning probe techniques :
o Scanning capacitance microscopy (SCM)
o TUNA and Peak Force TUNA
o 3 microscopes available inluding one in UHV (Omicron XA-VT), current measurement down to 110
K and up to 500 K
* Macroscopic I-V, C-V and I-t measurements at variable temperature
* Clean room facilities (metal deposition, lithography, etc).
2020-06-18. Dominik Ziegler Nanosurf AG As an AFM manufacturer, Nanosurf would be willing to provide its expertise in scanning techniques, and validate the scientific results of the project. We would also provide our AFMs for testing the SMM calibration routines (in collaboration with METAS).
2020-06-18. Denis Vasyukov Nanosurf AG As an AFM manufacturer, Nanosurf would be willing to provide its expertise in scanning techniques, and validate the scientific results of the project. We would also provide our AFMs for testing the SMM calibration routines (in collaboration with METAS).
2020-06-17. John Weaver Glasgow University Scanning of functionalised AFM probes in a commercial AFM
Scanning of probes using piezostage
Design and construction of supporting electronic instrumentation and mounting
Full range of fabrication technology including e-beam and optical exposure, plasma etch and deposition, supporting metrology including optical microscopy, SEM AFM ellipsometry and optical profilometry
Some access to high frequency on-wafer test
Fabrication of nanostructured test samples on a wafer scale
Fabrication of functionalised AFM probes on a wafer scale
2020-06-17. Johannes Hoffmann Federal Institute of Metrology Switzerland SMM measurements
SMM hardware development
high frequency metrology
Clean room work
Comsol simulation
2020-06-16. François Piquemal LNE Interferometric SMM system operating in N2 environment (glovebox) in the frequency range 0.5 GHz to 6 GHz.


Conductive AFM techniques based on Resiscope and covering the resistance range from 100 Ω to 1 TΩ. The system can operate in the inert gas environment.


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